Tantalum Nitride
TaN
wdx 
edx 
thin film
thin foil
xrf
edx
thin film
thin foil
xrf
CAS #
12033-62-4
Form
Powder
Notes
Suitable areas need to be searched for and spot analysis may need selecting.
| Element | WT% |
| Ta | 92.82% |
| N | 7.18% |
| Compound | WT% |
